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Spare parts

You will find here any edge welded bellows as spare parts for sputter implanter or damping plant in vakuum.

691000 Axcellis 1906890 Axcellis Bellows Wafer Holder 1907760 Axcellis V4 Bellows 1907810 Axcellis 1907830 Axcellis 1908910 Axcellis 1908980 Axcellis 1910680 Axcellis Unclamper Bellows 1911850 Axcellis 1912090 Axcellis VAC Casette Bellows 1912100 Axcellis 1914290 Axcellis 1914370 Axcellis 1915830 Axcellis 1916370 Axcellis 1916790 Axcellis 1917270 Axcellis 1917280 Axcellis 1917660 Axcellis 1919090 Axcellis 17031140 Axcellis Resonator bellows 17161640 Axcellis V3 Beamline Bellows 17352880 Axcellis 17358530 Axcellis 190000330 Axcellis 190000360 Axcellis 190003480 Axcellis 0475-0010-0001 Axcellis 0475-0015-003 Axcellis 0475-0018-0001 Axcellis Bellows Assy, Beam Profiler 0992-10721 Axcellis 17302780 Axcellis 1906850 Axcellis Arm bellows 19S0201 Axcellis 19S0217 Axcellis Casette Stand Bellows 19S0357 Axcellis 19S0415 Axcellis 19S0465 Axcellis 839-250568-001 LAM Bellows Lower Electrode A-100273-C MRC Bellows Front Cover A-119576-D MRC Bellows Front Cover 818-27-100 MRC Etch Bellows A-110139-L MRC Bellows Back Plane 32101298 Singulus Membranbalg 113894 Brooks 122307 Brooks 123603 Brooks 126280 Brooks 127982 Brooks 132528 Brooks 144706 Brooks 153845 Brooks 158935 Brooks 001-9093-01 Brooks 001-9093-05 Brooks 002-0937-01 Brooks 002-1704-01 Brooks 002-1704-02 Brooks 002-2405-01 Brooks 002-3164-01 Brooks 002-3290-01 Brooks 002-8247-01 Brooks 003-6153-03 Brooks 118749 Brooks 1000553 Mattson 1005728 Mattson 1007647 Mattson 258-0601-00 Mattson 258-08908-00 Mattson 303-05831-00 Mattson 303-07741-00 Mattson 303-21216-00 Mattson 303-22112-00 Mattson 303-22839-00 Mattson 02-047406-01 Novellus 02-136089-00 Novellus 02-152880-00 Novellus 02-159137-00 Novellus 02-160858-00 Novellus 02-252432-00 Novellus 02-259457-00 Novellus 02-259783-00 Novellus 02-279562-00 Novellus 02-285510-00 Novellus 02-293401-00 Novellus 02-309899-00 Novellus 02-326570-00 Novellus 02-339844-00 Novellus 05-3618 Novellus 10-286856-00 Novellus 10-291726-00 Novellus 15-046314-00 Novellus 15-11244-00 Novellus 15-276059-00 Novellus 15-286822-00 Novellus 15-286908-00 Novellus 16-050195-00 Novellus 16-051122-00 Novellus 16-10044-00 Novellus 16-109395-00 Novellus 16-118351-01 Novellus 16-118351-01 Novellus 16-124712-00 Novellus 16-125887-00 Novellus 16-128855-00 Novellus 16-129269-00 Novellus 16-134734-00 Novellus Bellows, speed, concentric lift 16-144643-00 Novellus 16-159939-00 Novellus 16-160227-00 Novellus 16-167821-00 Novellus 16-183665-00 Novellus 16-250925-00 Novellus 16-251069-00 Novellus 16-252575-00 Novellus 16-254119-00 Novellus 16-262139-00 Novellus 16-263721-00 Novellus 16-263722-00 Novellus 16-270947-00 Novellus 16-274114-00 Novellus 16-279123-00 Novellus 16-279124-00 Novellus 16-285323-00 Novellus 16-285324-00 Novellus 16-287171-00 Novellus 16-288012-00 Novellus 16-289173-00 Novellus 16-289220-00 Novellus 16-289221-00 Novellus 16-291660-00 Novellus 16-293710-00 Novellus 16-295908-00 Novellus 16-300432-00 Novellus 16-300609-00 Novellus 16-301379-00 Novellus 16-304950-00 Novellus 16-308600-00 Novellus 16-318952-00 Novellus 16-319139-00 Novellus 16-319165-00 Novellus 16-338344-00 Novellus 16-346346-00 Novellus 16-348103-00 Novellus 16-350840-00 Novellus 17-259785-00 Novellus 17-285097-00 Novellus 18-301030-00 Novellus 19-033267-00 Novellus 19-100586-00 Novellus 20-286359-00 Novellus 60-152879-00 Novellus 61-286574-00 Novellus 300267405 Oerlikon 400202107 Oerlikon 4383745001 Oerlikon 102276132 Oerlikon 300132887 Oerlikon 300347462 Oerlikon 300498859 Oerlikon 4151078035010 Oerlikon 398 1425 Pink 398 1832 Pink 398 2040 Pink 398 2249 Pink 398 3555 Pink 398 3958 Pink 398 4772 Pink 398 6489 Pink 398 9011 Pink 398 1013 Pink 00-680547-00 Varian Load Lock Ram Bellows 112132001 Varian 112132001 Varian 101626001 Varian 105088001 Varian Beam Gate Bellows 111326001 Varian 2553147 Varian 2595088 Varian 4176900 Varian 61871 Varian 67827401-B Varian Wafer Load Lock Bellows C680909 Varian Pressure Plate Ram Bellows E17086220 Varian E17087230 Varian E17094630 Varian Beam Gate Bellows E17246070 Varian E17252770 Varian E17349770 Varian E17471910 Varian E19000070 Varian Extraction bellows E19000130 Varian E19002530 Varian E19014410 Varian E19014670 Varian E19282990 Varian E19285360 Varian E19291130 Varian J-0145-00 Varian BB 284141-X

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Last modification on 01.06.2010