UHV Manipulators enable sample analyses in Ultra High Vacuum. They help research laboratory in universities, research centers and industry labs who study the physical properties of materials. Manipulators move samples in the right position e.g. into the focus of a laser beam, in the clear position for an x-ray analyzer, from a process chamber to an analysing chamber, from a treatment chamber out in a load lock system.
UHV Manipulators do position, support, heat and cool probes.
The positioning of samples is done by linear bearing slides for axis xy and z. Due to inner mechanical means, rotation, tilt and second rotation can be precisely carried out. The sample holder is by the precisely acting mechanical tools to manipulate in 6 axis. METALLIC FLEX Bellows helps to achieve the exact position under UHV condition.
Samples can be heated by metalic or ceramic heaters up to 1000°C.
Cryostats cool samples down to cryogenic temperatures of 10K.
Sample handlig systems take over samples from one chamber system into another.
We have long term experience. Our manipulators are built many times and are in use over many years. |
Ask us for the manipulator catalogue!